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Title: Method of making an improved superconducting quantum interference device

Abstract

An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.

Inventors:
 [1];  [2];  [3]
  1. Hinsdale, IL
  2. Woodridge, IL
  3. Darien, IL
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
OSTI Identifier:
862976
Patent Number(s):
4064029
Assignee:
United States of America as represented by United States Energy (Washington, DC)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; improved; superconducting; quantum; interference; device; sputtering; film; alloy; niobium; pattern; comprising; closed; loop; narrow; region; depositing; radiation; shield; copper; niobium-tin; scribing; line; exposing; structure; scribed; removing; deposited; quantum interference; radiation shield; closed loop; superconducting quantum; interference device; improved superconducting; narrow line; deposited copper; /204/29/324/505/

Citation Formats

Wu, Cheng-Teh, Falco, Charles M, and Kampwirth, Robert T. Method of making an improved superconducting quantum interference device. United States: N. p., 1977. Web.
Wu, Cheng-Teh, Falco, Charles M, & Kampwirth, Robert T. Method of making an improved superconducting quantum interference device. United States.
Wu, Cheng-Teh, Falco, Charles M, and Kampwirth, Robert T. Sat . "Method of making an improved superconducting quantum interference device". United States. https://www.osti.gov/servlets/purl/862976.
@article{osti_862976,
title = {Method of making an improved superconducting quantum interference device},
author = {Wu, Cheng-Teh and Falco, Charles M and Kampwirth, Robert T},
abstractNote = {An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1977},
month = {1}
}

Patent:

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