X-ray transmissive debris shield
Abstract
An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
- Inventors:
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 238067
- Patent Number(s):
- 5519752
- Application Number:
- PAN: 8-322,533
- Assignee:
- Sandia Corp., Albuquerque, NM (United States)
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 21 May 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT; SHIELDS; X RADIATION; MASKING; ABSORPTION; ATTENUATION; SHOCK WAVES; MANUFACTURING
Citation Formats
Spielman, R B. X-ray transmissive debris shield. United States: N. p., 1996.
Web.
Spielman, R B. X-ray transmissive debris shield. United States.
Spielman, R B. Tue .
"X-ray transmissive debris shield". United States.
@article{osti_238067,
title = {X-ray transmissive debris shield},
author = {Spielman, R B},
abstractNote = {An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 21 00:00:00 EDT 1996},
month = {Tue May 21 00:00:00 EDT 1996}
}
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