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Title: X-ray transmissive debris shield

An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
Inventors:
 [1]
+ Show Author Affiliations
  1. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
870431
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 5519752
Contract Number:
AC04-76DP00789
Research Org:
AT & T CORP
Country of Publication:
United States
Language:
English
Subject:
x-ray; transmissive; debris; shield; lithography; comprised; window; layer; density; foam; exhibits; increased; longevity; substantial; increase; exposure; time; serves; absorb; emitted; source; attenuate; shock; reduce; chance; breakage; x-rays; hardly; attenuated; substantially; substantial increase; layer serves; density foam; substantially increased; x-ray lithography; x-ray source; exposure time; transmissive debris; substantially increase; x-ray transmissive; debris shield; exhibits increased; /378/

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