X-ray transmissive debris shield
Abstract
An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- AT&T
- OSTI Identifier:
- 870431
- Patent Number(s):
- 5519752
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- x-ray; transmissive; debris; shield; lithography; comprised; window; layer; density; foam; exhibits; increased; longevity; substantial; increase; exposure; time; serves; absorb; emitted; source; attenuate; shock; reduce; chance; breakage; x-rays; hardly; attenuated; substantially; substantial increase; layer serves; density foam; substantially increased; x-ray lithography; x-ray source; exposure time; transmissive debris; substantially increase; x-ray transmissive; debris shield; exhibits increased; /378/
Citation Formats
Spielman, Rick B. X-ray transmissive debris shield. United States: N. p., 1996.
Web.
Spielman, Rick B. X-ray transmissive debris shield. United States.
Spielman, Rick B. Mon .
"X-ray transmissive debris shield". United States. https://www.osti.gov/servlets/purl/870431.
@article{osti_870431,
title = {X-ray transmissive debris shield},
author = {Spielman, Rick B},
abstractNote = {An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}
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