X-ray transmissive debris shield
An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.
- Issue Date:
- OSTI Identifier:
- 238067
- Assignee:
- Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 320303; 426000; PA: EDB-96:093149; SN: 96001594377
- Patent Number(s):
- US 5,519,752/A/
- Application Number:
- PAN: 8-322,533
- Contract Number:
- AC04-76DP00789
- Resource Relation:
- Other Information: PBD: 21 May 1996
- Research Org:
- AT&T Corporation
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT; SHIELDS; X RADIATION; MASKING; ABSORPTION; ATTENUATION; SHOCK WAVES; MANUFACTURING