X-ray transmissive debris shield

Title: X-ray transmissive debris shield

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An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

Inventors:: Spielman, R.B.

Issue Date:: 1996-05-21

OSTI Identifier:: 238067

Assignee:: Sandia Corp., Albuquerque, NM (United States) SNL; SCA: 320303; 426000; PA: EDB-96:093149; SN: 96001594377

Patent Number(s):: US 5,519,752/A/

Application Number:: PAN: 8-322,533

Contract Number:: AC04-76DP00789

Resource Relation:: Other Information: PBD: 21 May 1996

Research Org:: AT&T Corporation

Country of Publication:: United States

Language:: English

Subject:: 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; FABRICATION; EQUIPMENT; SHIELDS; X RADIATION; MASKING; ABSORPTION; ATTENUATION; SHOCK WAVES; MANUFACTURING

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