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Title: High power, long focus electron source for beam processing

Abstract

Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531535
Patent Number(s):
7250727
Application Number:
11/143,417
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
W-31-109-ENG-38
Resource Type:
Patent
Resource Relation:
Patent File Date: 2005-06-02
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS

Citation Formats

Lewellen, John W., and Noonan, John. High power, long focus electron source for beam processing. United States: N. p., 2007. Web.
Lewellen, John W., & Noonan, John. High power, long focus electron source for beam processing. United States.
Lewellen, John W., and Noonan, John. Tue . "High power, long focus electron source for beam processing". United States. https://www.osti.gov/servlets/purl/1531535.
@article{osti_1531535,
title = {High power, long focus electron source for beam processing},
author = {Lewellen, John W. and Noonan, John},
abstractNote = {Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 31 00:00:00 EDT 2007},
month = {Tue Jul 31 00:00:00 EDT 2007}
}

Works referenced in this record:

Ribbon beam free electron laser
patent, December 1989


Electron beam measuring instrument
patent, October 1990


Particle beam accelerator, and a method of operation
patent, July 1998


Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
patent-application, January 2004


Ion beam therapy system and a method for operating the system
patent, January 2004


Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility
patent-application, June 2004


    Works referencing / citing this record: