High power, long focus electron source for beam processing
Abstract
Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531535
- Patent Number(s):
- 7250727
- Application Number:
- 11/143,417
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-31-109-ENG-38
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2005-06-02
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS
Citation Formats
Lewellen, John W., and Noonan, John. High power, long focus electron source for beam processing. United States: N. p., 2007.
Web.
Lewellen, John W., & Noonan, John. High power, long focus electron source for beam processing. United States.
Lewellen, John W., and Noonan, John. Tue .
"High power, long focus electron source for beam processing". United States. https://www.osti.gov/servlets/purl/1531535.
@article{osti_1531535,
title = {High power, long focus electron source for beam processing},
author = {Lewellen, John W. and Noonan, John},
abstractNote = {Beam processing methods including e-beam welding and e-beam evaporation for thin film deposition are implemented with a novel high power, long focus electron source. The high power, long focus electron source generates an e-beam. The e-beam is transported through a series of steering magnets to steer the beam. At least one refocusing magnet is provided to refocus the e-beam. A final steering magnet bends the e-beam to focus on a target, such as a weld joint or a deposition target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {7}
}
Works referenced in this record:
Ribbon beam free electron laser
patent, December 1989
- Dolezal, Franklin A.; Harvey, Robin J.
- US Patent Document 4,888,776
Electron beam measuring instrument
patent, October 1990
- Otto, Johann; Plies, Erich
- US Patent Document 4,963,823
Particle beam accelerator, and a method of operation
patent, July 1998
- Hiramoto, Kazuo; Hirota, Junichi; Tadokoro, Masahiro
- US Patent Document 5,783,914
Electron beam machining using rotating and shaped beam power distribution
patent, July 1996
- Elmer, John W.; O'Brien, Dennis
- US Patent Document 5,534,677
Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
patent-application, January 2004
- Horsky, Thomas Neil; Jacobson, Dale Conrad; Krull, Wade Allen
- US Patent Application 10/251491; 20040002202
Combined ion and molecular beam apparatus and method for depositing materials
patent, January 1989
- Herbots, Nicole; Hellman, Olof C.
- US Patent Document 4,800,100
Ion beam therapy system and a method for operating the system
patent, January 2004
- Haberer, Thomas; Kraemer, Michael; Kraft, Gerhard
- US Patent Document 6,683,318
Gantry system for transport and delivery of a high energy ion beam in a heavy ion cancer therapy facility
patent-application, June 2004
- Eickhoff, Hartmut; Spiller, Peter; Pavlovic, Marius
- US Patent Application 10/470477; 20040113099
Works referencing / citing this record:
Field emission cathode gating for RF electron guns and planar focusing cathodes
patent, July 2008
- Lewellen, John; Noonan, John
- US Patent Document 7,394,201