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Title: High reliability, long lifetime, negative ion source

Abstract

A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.

Inventors:
; ; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
Phoenix LLC, Monona, WI (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1805638
Patent Number(s):
10950409
Application Number:
16/416,423
Assignee:
Phoenix LLC (Monona, WI)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05H - PLASMA TECHNIQUE
DOE Contract Number:  
SC0009642
Resource Type:
Patent
Resource Relation:
Patent File Date: 05/20/2019
Country of Publication:
United States
Language:
English

Citation Formats

Sherman, Jason D., Sengbusch, Evan R., Radel, Ross F., Kobernik, Arne V., Gribb, Tye T., Barrows, Preston J., Seyfert, Christopher M., Campbell, Logan D., Swanson, Daniel J., Risley, Eric D., Lee, Jin Woo, and Meaney, Kevin D. High reliability, long lifetime, negative ion source. United States: N. p., 2021. Web.
Sherman, Jason D., Sengbusch, Evan R., Radel, Ross F., Kobernik, Arne V., Gribb, Tye T., Barrows, Preston J., Seyfert, Christopher M., Campbell, Logan D., Swanson, Daniel J., Risley, Eric D., Lee, Jin Woo, & Meaney, Kevin D. High reliability, long lifetime, negative ion source. United States.
Sherman, Jason D., Sengbusch, Evan R., Radel, Ross F., Kobernik, Arne V., Gribb, Tye T., Barrows, Preston J., Seyfert, Christopher M., Campbell, Logan D., Swanson, Daniel J., Risley, Eric D., Lee, Jin Woo, and Meaney, Kevin D. Tue . "High reliability, long lifetime, negative ion source". United States. https://www.osti.gov/servlets/purl/1805638.
@article{osti_1805638,
title = {High reliability, long lifetime, negative ion source},
author = {Sherman, Jason D. and Sengbusch, Evan R. and Radel, Ross F. and Kobernik, Arne V. and Gribb, Tye T. and Barrows, Preston J. and Seyfert, Christopher M. and Campbell, Logan D. and Swanson, Daniel J. and Risley, Eric D. and Lee, Jin Woo and Meaney, Kevin D.},
abstractNote = {A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {3}
}

Works referenced in this record:

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Negative Ion Source with External RF Antenna
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Three chamber negative ion source
patent, December 1985


High reliability, long lifetime, negative ion source
patent, December 2017


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patent-application, December 2009


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patent-application, October 2002


High Reliability, Long Lifetime, Negative Ion Source
patent-application, May 2018


High reliability, long lifetime, negative ion source
patent, May 2019


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patent, April 2001


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patent, January 2003


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patent, August 2004


Hyperthermal Neutral Beam Source and Method of Operating
patent-application, March 2007


Negative Ion-based Neutral Beam Injector
patent-application, August 2015


Deposition of Amorphous Silicon Films by Electron Cyclotron Resonance
patent-application, March 2010