Global to push GA events into
skip to main content

Title: Tunable cavity resonator including a plurality of MEMS beams

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
Inventors:
; ; ; ; ;
Issue Date:
OSTI Identifier:
1223688
Assignee:
Purdue Research Foundation (West Lafayette, IN) NNSASC
Patent Number(s):
9,166,271
Application Number:
13/908,201
Contract Number:
FC52-08NA28617
Resource Relation:
Patent File Date: 2013 Jun 03
Research Org:
Purdue Research Foundation, West Lafayette, IN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS

Works referenced in this record:

Measurement of the mechanical properties of electroplated gold thin films using micromachined beam structures
journal, January 2005
  • Baek, Chang-Wook; Kim, Yong-Kweon; Ahn, Yoomin
  • Sensors and Actuators A: Physical, Vol. 117, Issue 1, p. 17-27
  • DOI: 10.1016/j.sna.2003.11.041

VLSI circuit reconstruction from mask topology
journal, June 1984