Tunable cavity resonator including a plurality of MEMS beams
Abstract
A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
- Inventors:
- Issue Date:
- Research Org.:
- Purdue Univ., West Lafayette, IN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1223688
- Patent Number(s):
- 9166271
- Application Number:
- 13/908,201
- Assignee:
- Purdue Research Foundation (West Lafayette, IN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01P - WAVEGUIDES
- DOE Contract Number:
- FC52-08NA28617
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Jun 03
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 43 PARTICLE ACCELERATORS
Citation Formats
Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, and Arif, Muhammad Shoaib. Tunable cavity resonator including a plurality of MEMS beams. United States: N. p., 2015.
Web.
Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, & Arif, Muhammad Shoaib. Tunable cavity resonator including a plurality of MEMS beams. United States.
Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, and Arif, Muhammad Shoaib. Tue .
"Tunable cavity resonator including a plurality of MEMS beams". United States. https://www.osti.gov/servlets/purl/1223688.
@article{osti_1223688,
title = {Tunable cavity resonator including a plurality of MEMS beams},
author = {Peroulis, Dimitrios and Fruehling, Adam and Small, Joshua Azariah and Liu, Xiaoguang and Irshad, Wasim and Arif, Muhammad Shoaib},
abstractNote = {A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {10}
}
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