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Title: MEMS-tunable optical ring resonator

Abstract

A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved.

Inventors:
; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
2222097
Patent Number(s):
11722120
Application Number:
17/391,126
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 08/02/2021
Country of Publication:
United States
Language:
English

Citation Formats

Wood, Michael, Grine, Alejandro J., Serkland, Darwin K., and Ruyack, Alexander. MEMS-tunable optical ring resonator. United States: N. p., 2023. Web.
Wood, Michael, Grine, Alejandro J., Serkland, Darwin K., & Ruyack, Alexander. MEMS-tunable optical ring resonator. United States.
Wood, Michael, Grine, Alejandro J., Serkland, Darwin K., and Ruyack, Alexander. Tue . "MEMS-tunable optical ring resonator". United States. https://www.osti.gov/servlets/purl/2222097.
@article{osti_2222097,
title = {MEMS-tunable optical ring resonator},
author = {Wood, Michael and Grine, Alejandro J. and Serkland, Darwin K. and Ruyack, Alexander},
abstractNote = {A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {8}
}

Works referenced in this record:

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Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in
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Integrated wavelength-selective optical MEMS switching using ring resonator filters
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Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators
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Tunable ring resonator
patent, September 2013


Nano–opto-electro-mechanical switches operated at CMOS-level voltages
journal, November 2019


A 25 Gb/s, 4.4 V-Swing, AC-Coupled Ring Modulator-Based WDM Transmitter with Wavelength Stabilization in 65 nm CMOS
journal, December 2015


Tunable Optical Filter
patent-application, June 2004