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Title: Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon

Abstract

The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive .alpha.-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf .alpha.-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf .alpha.-mode plasmas for various materials processing applications.

Inventors:
;
Issue Date:
Research Org.:
The Regents of the University of California, Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1175401
Patent Number(s):
6,909,237
Application Number:
10/205,786
Assignee:
The Regents of the University of California (Los Alamos, NM)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Park, Jaeyoung, and Henins, Ivars. Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon. United States: N. p., 2005. Web.
Park, Jaeyoung, & Henins, Ivars. Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon. United States.
Park, Jaeyoung, and Henins, Ivars. Tue . "Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon". United States. https://www.osti.gov/servlets/purl/1175401.
@article{osti_1175401,
title = {Production of stable, non-thermal atmospheric pressure rf capacitive plasmas using gases other than helium or neon},
author = {Park, Jaeyoung and Henins, Ivars},
abstractNote = {The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive .alpha.-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf .alpha.-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf .alpha.-mode plasmas for various materials processing applications.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2005},
month = {6}
}

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