Method for making dense crack free thin films
Abstract
The process described herein provides a simple and cost effective method for making crack free, high density thin ceramic film. The steps involve depositing a layer of a ceramic material on a porous or dense substrate. The deposited layer is compacted and then the resultant laminate is sintered to achieve a higher density than would have been possible without the pre-firing compaction step.
- Inventors:
-
- Lafayette, CA
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1007932
- Patent Number(s):
- 7163713
- Application Number:
- 10/162,511
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01D - SEPARATION
C - CHEMISTRY C04 - CEMENTS C04B - LIME, MAGNESIA
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Jacobson, Craig P, Visco, Steven J, and De Jonghe, Lutgard C. Method for making dense crack free thin films. United States: N. p., 2007.
Web.
Jacobson, Craig P, Visco, Steven J, & De Jonghe, Lutgard C. Method for making dense crack free thin films. United States.
Jacobson, Craig P, Visco, Steven J, and De Jonghe, Lutgard C. Tue .
"Method for making dense crack free thin films". United States. https://www.osti.gov/servlets/purl/1007932.
@article{osti_1007932,
title = {Method for making dense crack free thin films},
author = {Jacobson, Craig P and Visco, Steven J and De Jonghe, Lutgard C},
abstractNote = {The process described herein provides a simple and cost effective method for making crack free, high density thin ceramic film. The steps involve depositing a layer of a ceramic material on a porous or dense substrate. The deposited layer is compacted and then the resultant laminate is sintered to achieve a higher density than would have been possible without the pre-firing compaction step.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {1}
}
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Works referenced in this record:
Improved preparation procedure and properties for a multilayer piezoelectric thick-film actuator
journal, November 1998
- Yao, Kui; Zhu, Weiguang
- Sensors and Actuators A: Physical, Vol. 71, Issue 1-2