Application of short pulsed laser systems for micro-scale processing.
The relatively recent development of short (nsec) and ultra-short (fsec) pulsed laser systems has introduced process capabilities which are particularly suited for micro-manufacturing applications. Micrometer feature resolutions and minimal heat affected zones are commonly cited benefits, although unique material interactions also prove attractive for many applications. A background of short and ultra-short pulsed laser system capabilities and material interactions will be presented for micro-scale processing. Processing strengths and limitations will be discussed and demonstrated within the framework of applications related to micro-machining, material surface modifications, and fundamental material science research.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 991014
- Report Number(s):
- SAND2010-1914C
- Country of Publication:
- United States
- Language:
- English
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