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Electron Backscatter Diffraction in Low Vacuum Conditions

Book ·
OSTI ID:989345

Most current scanning electron microscopes (SEMs) have the ability to analyze samples in a low vacuum mode, whereby a partial pressure of water vapor is introduced into the SEM chamber, allowing the characterization of nonconductive samples without any special preparation. Although the presence of water vapor in the chamber degrades electron backscatter diffraction (EBSD) patterns, the potential of this setup for EBSD characterization of nonconductive samples is immense. In this chapter we discuss the requirements, advantages and limitations of low vacuum EBSD (LV-EBSD), and present how this technique can be applied to a two-phase ceramic composite as well as hydrated biominerals as specific examples of when LV-EBSD can be invaluable.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
989345
Report Number(s):
LLNL-BOOK-405556
Country of Publication:
United States
Language:
English