Silicon Micromachines for Science and Technology

Multimedia · Fri May 08 00:00:00 EDT 2009

OSTI ID:987404

Bishop, David J. ^[1]

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1. OSTI/ DOE

The era of silicon micromechanics is upon us. In areas as diverse as telecommunications, automotive, aerospace, chemistry, entertainment and basic science, the ability to build microscopic machines from silicon is having a revolutionary impact. In my talk, I will discuss what micromachines are, how they are built and show examples of how they will have a revolutionary impact in many areas of science as well as technology. 

• Research Organization: FNAL (Fermi National Accelerator Laboratory (FNAL), Batavia, IL (United States))
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: AC02-07CH11359
• OSTI ID: 987404
• Country of Publication: United States
• Language: English

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