Studies in Optimal Configuration of the LTP

Conference · Tue Aug 10 04:00:00 EDT 2010

OSTI ID:986878

McKinney, Wayne R; Anders, Mark; Barber, Samuel K; Domning, Edward E; Lou, Yunian; Morrison, Gregory Y; Salmassi, Farhad; Smith, Brian V; Yashchuk, Valeriy V

Brightness preservation requirements for ever brighter synchrotron radiation and free electron laser beamlines require surface slope tolerances of x-ray optics on the order of 0.2 mu rad, or better. Hence, the accuracy of dedicated surface slope metrology must be 0.1 mu rad, or even less. Achieving this level of measurement accuracy with the flagship instrument at synchrotron radiation metrology laboratories, the Long Trace Profiler (LTP), requires all significant sources of systematic, random, and instrumental drift errors to be identified, and reduced or eliminated. In this respect, the performance of certain components of the Advanced Light Source LTP-II design [Kirschman, et al., Proc. SPIE, 7077, 70770A-12 (2008)] is analyzed, considering the principal justification for inclusion of each component, possible systematic error due to the quality of its optical material, and drift effects due to generated heat, etc. We investigate the effects of replacement of the existing diode laser with a fiber-coupled laser light source, and demonstrate that reducing the number of components by using a single beam on the surface under test (SUT), rather than an original double beam maintains, or even improves the accuracy of measurement with our LTP. Based on the performance of the upgraded LTP, we trace the further steps for improving of the LTP optical system.

• Research Organization: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
• Sponsoring Organization: Advanced Light Source Division
• DOE Contract Number: AC02-05CH11231
• OSTI ID: 986878
• Report Number(s): LBNL-3835E
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
ACCURACY
ADVANCED LIGHT SOURCE
BRIGHTNESS
CONFIGURATION
DESIGN
FREE ELECTRON LASERS
LASERS
LIGHT SOURCES
OPTICAL SYSTEMS
OPTICS
PERFORMANCE
PRESERVATION
SYNCHROTRON RADIATION
slope measurement
LTP
long trace profiler
optical metrology
x-ray optics
synchrotron radiation
beamline