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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
 [1]
  1. (Urbana, IL)
Publication Date:
Research Org.:
University of Illinois (Urbana, IL)
Sponsoring Org.:
USDOE
OSTI Identifier:
986563
Patent Number(s):
7,521,292
Application Number:
11/423,287; TRN: US201018%%39
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; FLEXIBILITY; ELECTRONIC CIRCUITS; ELONGATION; MONOCRYSTALS; PERFORMANCE; RUBBERS; SILICON; SUBSTRATES; DESIGN; SEMICONDUCTOR DEVICES

Citation Formats

University of Illinois. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States: N. p., 2009. Web.
University of Illinois. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States.
University of Illinois. Tue . "Stretchable form of single crystal silicon for high performance electronics on rubber substrates". United States. https://www.osti.gov/servlets/purl/986563.
@article{osti_986563,
title = {Stretchable form of single crystal silicon for high performance electronics on rubber substrates},
author = {University of Illinois},
abstractNote = {The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
url = {https://www.osti.gov/biblio/986563}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {4}
}

Patent:

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journal, March 2004


Fabrication of Metal Nanowires Using Microcontact Printing
journal, July 2003


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes
journal, January 1995


Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown
journal, April 2001


Finer features for functional microdevices
journal, August 2001


Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes
journal, July 2002


Nonlinear analyses of wrinkles in a film bonded to a compliant substrate
journal, September 2005


Flexible active-matrix displays and shift registers based on solution-processed organic transistors
journal, January 2004


Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing
journal, September 2003


Self-aligned self-assembly process for fabricating organic thin-film transistors
journal, September 2004


Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays
journal, April 1997


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching
journal, February 1999


Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
journal, November 2004


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates
journal, November 2003


Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
journal, February 1998


Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals
journal, March 2004


All-Polymer Field-Effect Transistor Realized by Printing Techniques
journal, September 1994


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


Semiconductor nanowires for novel one-dimensional devices
journal, March 2004


New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region
journal, July 1996


All-Inorganic Field Effect Transistors Fabricated by Printing
journal, October 1999


A buckling-based metrology for measuring the elastic moduli of polymeric thin films
journal, July 2004


The Incredible Shrinking Circuit
journal, September 2001


AlGaN/GaN HEMTs-an overview of device operation and applications
journal, June 2002


Semiconductor Clusters, Nanocrystals, and Quantum Dots
journal, February 1996


Two-versus three-dimensional quantum confinement in indium phosphide wires and dots
journal, July 2003


An Orientation-Controlled Pentacene Film Aligned by Photoaligned Polyimide for Organic Thin-Film Transistor Applications
journal, August 2004


Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors
journal, March 2001


High-Resolution Contact Printing with Dendrimers
journal, April 2002


Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics
journal, October 2004


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates
journal, September 2005


Some properties of spherical and rod-shaped semiconductor and metal nanocrystals
journal, January 2002


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN
journal, August 2002


Biological applications of high aspect ratio nanoparticles
journal, January 2004


Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport
journal, January 2003


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


Colloidal nanocrystal synthesis and the organic–inorganic interface
journal, September 2005


Mechanically Strained Strained-Si NMOSFETs
journal, January 2004


One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise
journal, April 2005


Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution
journal, October 2005


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors
journal, October 1997


GaAs Readied for High-Speed Microcircuits
journal, January 1983


Complementary carbon nanotube-gated carbon nanotube thin-film transistor
journal, February 2006


Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile
journal, June 2003


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Guided molecular self-assembly: a review of recent efforts
journal, March 2003


Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
journal, December 2000


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


Shape-and-solder-directed self-assembly to package semiconductor device segments
journal, October 2004