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Title: Laser Patterning of Diamond. Part II. Surface Nondiamond Carbon Formation and its Removal

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.3152995· OSTI ID:980302

As diamond becomes more prevalent for electronic and research applications, methods of patterning diamond will be required. One such method, laser ablation, has been investigated in a related work. We report on the formation of surface nondiamond carbon during laser ablation of both polycrystalline and single-crystal synthetic diamonds. Near edge x-ray absorption fine structure spectroscopy was used to confirm that the nondiamond carbon layer formed during the ablation was amorphous, and Fourier transform infrared absorption spectroscopy (FTIR) was used to estimate the thickness of this layer to be {approx} 60 nm. Ozone cleaning was used to remove the nondiamond carbon layer.

Research Organization:
Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source
Sponsoring Organization:
Doe - Office Of Science
DOE Contract Number:
DE-AC02-98CH10886
OSTI ID:
980302
Report Number(s):
BNL-93220-2010-JA; JAPIAU; TRN: US201015%%1687
Journal Information:
Journal of Applied Physics, Vol. 105; ISSN 0021-8979
Country of Publication:
United States
Language:
English