Ion-beam assisted deposition of MgO with in situ RHEED monitoring to control Bi-axial texture

Conference · Sun Dec 31 23:00:00 EST 2000

OSTI ID:975296

Arendt, P N ^[1]; Foltyn, S R ^[2]; Jia, Quanxi; DePaula, R F ^[3]; Dowden, P C ^[4]; Kung, H ^[5]; Holesinger, T G ^[6]; Stan, L ^[7]; Emmert, L A ^[8]; Peterson, E J ^[9]; Groves, J R ^[10]

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1. Paul N.
2. Stephen R.
3. Raymond Felix
4. Paul C.
5. Harriett
6. Terry G.
7. Liliana
8. Luke A.
9. Eric J.
10. James R.

We have studied the growth of magnesium oxide using ion-beam assisted deposition (IBAD) to achieve (100) oriented, bi-axially textured films with low mosaic spread, for film thicknesses of 10 nm on silicon substrates. We have refined the process by using reflected high-energy electron diffraction (RHEED) to monitor the growth of IBAD MgO films and found that the diffracted intensity can be used to determine (and ultimately control) final in-plane texture of the film. Here we present results on our work to develop the use of real-time RHEED monitoring to deposit well-oriented IBAD MgO films. The results have been corroborated with extensive grazing-incidence X-ray diffraction (GID). Results of these analyses have allowed us to deposit films on metallic substrates with in-plane mosaic spread less than 7{sup o}.

• Research Organization: Los Alamos National Laboratory
• Sponsoring Organization: DOE
• OSTI ID: 975296
• Report Number(s): LA-UR-01-2098
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELECTRON DIFFRACTION
ENERGY BEAM DEPOSITION
MAGNESIUM OXIDES
MONITORING
ON-LINE MEASUREMENT SYSTEMS
SILICON
SUBSTRATES