Nanomechanical switch for integration with CMOS logic.
Journal Article
·
· Proposed for publication in the Journal of Microelectronics and Micromechanics.
OSTI ID:972477
We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 972477
- Report Number(s):
- SAND2008-7279J
- Journal Information:
- Proposed for publication in the Journal of Microelectronics and Micromechanics., Journal Name: Proposed for publication in the Journal of Microelectronics and Micromechanics.
- Country of Publication:
- United States
- Language:
- English
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