Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Electrodeposition for LIGA microfabrication using an anodized aluminum substrate.

Conference ·
OSTI ID:970235
; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
970235
Report Number(s):
SAND2005-3489C
Country of Publication:
United States
Language:
English

Similar Records

Anodized Aluminum Substrates for LIGA and the Effect of Aluminum Alloy on Electrodeposition.
Journal Article · Tue Aug 01 00:00:00 EDT 2006 · Galvanotechnik · OSTI ID:1141758
An aluminum resist substrate for microfabrication by LIGA.
Technical Report · Thu Mar 31 23:00:00 EST 2005 · OSTI ID:923166
Tilted logpile photonic crystals using the LIGA technique.
Conference · Tue Aug 01 00:00:00 EDT 2006 · OSTI ID:893546

Related Subjects

42 ENGINEERING
ALUMINIUM
ELECTRODEPOSITION
FABRICATION
MINIATURIZATION
SUBSTRATES