Reproducibility of critical dimensions in a LIGA fabricated spring.
Conference
·
OSTI ID:970231
No abstract prepared.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 970231
- Report Number(s):
- SAND2005-3491C
- Country of Publication:
- United States
- Language:
- English
Similar Records
LIGA micro-fabrication at Sandia/California.
LIGA fabricated high aspect ratio lamellar grating spectrometer.
Fabrication of miniaturized deflectors using LIGA
Conference
·
Fri Oct 01 00:00:00 EDT 2004
·
OSTI ID:884704
LIGA fabricated high aspect ratio lamellar grating spectrometer.
Conference
·
Wed Jun 01 00:00:00 EDT 2005
·
OSTI ID:970233
Fabrication of miniaturized deflectors using LIGA
Conference
·
Sun Oct 01 00:00:00 EDT 1995
·
OSTI ID:797173