Electronic Sputtering of Solids by Slow, Highly Charged Ions: Fundamentals and Applications
Conference
·
OSTI ID:9668
- Sandia National Laboratories
Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (US); Sandia National Labs., Livermore, CA (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 9668
- Report Number(s):
- SAND99-1911C
- Country of Publication:
- United States
- Language:
- English
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