Near-surface characterization of amorphous carbon films by neutron reflectivity.
A high-density top-surface layer of approximately 30 {angstrom} was found in a form of diamondlike carbon, 'near-frictionless carbon,' developed at Argonne National Laboratory. Three diamondlike-carbon films were prepared by plasma-enhanced chemical vapor deposition with different hydrogen-to-methane ratios in the plasma. Complementary films were prepared with deuterated methane and deuterium, in the same ratios. Results from neutron relectivity experiments are presented, along with model comparisons, and a hypothesis is postulated.
- Research Organization:
- Argonne National Laboratory (ANL)
- Sponsoring Organization:
- SC
- DOE Contract Number:
- AC02-06CH11357
- OSTI ID:
- 961247
- Report Number(s):
- ANL/ET/JA-45753
- Journal Information:
- Appl. Phys. Lett., Journal Name: Appl. Phys. Lett. Journal Issue: 3 ; Jul. 21, 2003 Vol. 83; ISSN APPLAB; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- ENGLISH
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