From Nanorings to Nanodots by Patteringin with Block Copolymers

Journal Article · Tue Jan 01 04:00:00 EST 2008 · Nano Letters

DOI:https://doi.org/10.1021/nl0805110· OSTI ID:960038

Park, S; Wang, J; Kim, B; Russell, T

We demonstrate three different transfer patterns that can be achieved by use of a surface reconstructed block copolymer film where metal is evaporated onto the surface of the film, providing the contrast. Thin films of diblock copolymers having cylindrical microdomains oriented normal to the surface with long-range lateral order were used. Solvent reconstruction of the film, followed by a glancing angle metal evaporation and thermal annealing, led to three different decorations of the films with gold. These films were used as masks for pattern transfer of pores, columns, and rings to underlying substrate with high fidelity.

• Research Organization: Brookhaven National Laboratory (BNL) National Synchrotron Light Source
• Sponsoring Organization: Doe - Office Of Science
• DOE Contract Number: AC02-98CH10886
• OSTI ID: 960038
• Report Number(s): BNL--83024-2009-JA
• Journal Information: Nano Letters, Journal Name: Nano Letters Journal Issue: 6 Vol. 8
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
ANNEALING
COPOLYMERS
EVAPORATION
GOLD
SOLVENTS
SUBSTRATES
THIN FILMS
national synchrotron light source