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Title: Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices

Abstract

Recently there has been an increasing demand to perform real-time in-situ chemical detection of hazardous materials, contraband chemicals, and explosive chemicals. Currently, real-time chemical detection requires rather large analytical instrumentation that are expensive and complicated to use. The advent of inexpensive mass produced MEMS (micro-electromechanical systems) devices opened-up new possibilities for chemical detection. For example, microcantilevers were found to respond to chemical stimuli by undergoing changes in their bending and resonance frequency even when a small number of molecules adsorb on their surface. In our present studies, we extended this concept by studying changes in both the adsorption-induced stress and photo-induced stress as target chemicals adsorb on the surface of microcantilevers. For example, microcantilevers that have adsorbed molecules will undergo photo-induced bending that depends on the number of absorbed molecules on the surface. However, microcantilevers that have undergone photo-induced bending will adsorb molecules on their surfaces in a distinctly different way. Depending on the photon wavelength and microcantilever material, the microcantilever can be made to bend by expanding or contracting the irradiated surface. This is important in cases where the photo-induced stresses can be used to counter any adsorption-induced stresses and increase the dynamic range. Coating the surface of themore » microstructure with a different material can provide chemical specificity for the target chemicals. However, by selecting appropriate photon wavelengths we can change the chemical selectivity due to the introduction of new surface states in the MEMS device. We will present and discuss our results on the use of adsorption-induced and photo-induced bending of microcantilevers for chemical detection.« less

Authors:
Publication Date:
Research Org.:
Oak Ridge National Lab., TN (US)
Sponsoring Org.:
USDOE Office of Science (US)
OSTI Identifier:
9536
Report Number(s):
ORNL/CP-102586; EW 45 10 00 0
EW 45 10 00 0; TRN: AH200124%%309
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Conference
Resource Relation:
Conference: SPIE 13th International Symposium on Aerosense, Orlando, FL (US), 04/05/1999--04/09/1999; Other Information: PBD: 5 Apr 1999
Country of Publication:
United States
Language:
English
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; 42 ENGINEERING; MICROELECTRONIC CIRCUITS; MINIATURIZATION; CHEMICAL ANALYSIS; ADSORPTION; BENDING; COATINGS; HAZARDOUS MATERIALS; MICROSTRUCTURE; SPECIFICITY; STRESSES; PHOTO-INDUCED STRESS; ELECTRON-HOLE PAIRS; ADSORPTION-INDUCED STRESS; RESONANCE FREQUENCY BIMATERIAL; MEMS

Citation Formats

Datskos, P G. Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices. United States: N. p., 1999. Web.
Datskos, P G. Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices. United States.
Datskos, P G. Mon . "Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices". United States. https://www.osti.gov/servlets/purl/9536.
@article{osti_9536,
title = {Chemical Detection Based on Adsorption-Induced and Photo-Induced Stresses in MEMS Devices},
author = {Datskos, P G},
abstractNote = {Recently there has been an increasing demand to perform real-time in-situ chemical detection of hazardous materials, contraband chemicals, and explosive chemicals. Currently, real-time chemical detection requires rather large analytical instrumentation that are expensive and complicated to use. The advent of inexpensive mass produced MEMS (micro-electromechanical systems) devices opened-up new possibilities for chemical detection. For example, microcantilevers were found to respond to chemical stimuli by undergoing changes in their bending and resonance frequency even when a small number of molecules adsorb on their surface. In our present studies, we extended this concept by studying changes in both the adsorption-induced stress and photo-induced stress as target chemicals adsorb on the surface of microcantilevers. For example, microcantilevers that have adsorbed molecules will undergo photo-induced bending that depends on the number of absorbed molecules on the surface. However, microcantilevers that have undergone photo-induced bending will adsorb molecules on their surfaces in a distinctly different way. Depending on the photon wavelength and microcantilever material, the microcantilever can be made to bend by expanding or contracting the irradiated surface. This is important in cases where the photo-induced stresses can be used to counter any adsorption-induced stresses and increase the dynamic range. Coating the surface of the microstructure with a different material can provide chemical specificity for the target chemicals. However, by selecting appropriate photon wavelengths we can change the chemical selectivity due to the introduction of new surface states in the MEMS device. We will present and discuss our results on the use of adsorption-induced and photo-induced bending of microcantilevers for chemical detection.},
doi = {},
url = {https://www.osti.gov/biblio/9536}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1999},
month = {4}
}

Conference:
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