The role of carrier gases in the production of metastable argon atoms in an RF discharge.

Journal Article · Sat Feb 28 23:00:00 EST 2009 · Rev. Sci. Instrum.

DOI:https://doi.org/10.1063/1.3105722· OSTI ID:953463

Rudinger, K; Lu, Z T; Mueller, P

We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar*/Ar) of 2 x 10{sup -4} at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 953463
• Report Number(s): ANL/PHY/JA-63327
• Journal Information: Rev. Sci. Instrum., Journal Name: Rev. Sci. Instrum. Journal Issue: Mar. 2009 Vol. 8; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATOMS
HELIUM
IONIZATION POTENTIAL
KRYPTON
NEON
PRODUCTION
RF SYSTEMS
XENON