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High gain, Fast Scan, Broad Spectrum Parallel Beam Wavelength Dispersive X-ray Spectrometer for SEM

Technical Report ·
DOI:https://doi.org/10.2172/952205· OSTI ID:952205

During contract # DE-FG02-ER83545, Parallax Research, Inc. developed a High gain, Fast Scan Broad Spectrum Parallel beam Wavelength Dispersive X-ray Spectrometer for use on Scanning Electron Microscopes (SEM). This new spectrometer allows very fast high resolution elemental analysis of samples in an electron microscope. By comparison to previous WDS spectrometers, it can change from one energy position to another very quickly and has an extended range compared to some similar products.

Research Organization:
Parallax Research, Inc.
Sponsoring Organization:
Chicago Operations
DOE Contract Number:
FG02-02ER83545
OSTI ID:
952205
Report Number(s):
DOE/ER/83545-FR
Country of Publication:
United States
Language:
English

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