Combined surface analytical methods to characterize degradative processes in anti-stiction films in MEMS devices.
Conference
·
OSTI ID:947830
Abstract Not Provided
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 947830
- Report Number(s):
- SAND2005-0563C
- Country of Publication:
- United States
- Language:
- English
Similar Records
Combined surface analytical methods to characterize degradative processes in anti-stiction films in MEMS devices.
Characterizing PDMS degradation films produced on metal surfaces.
Hermeticity Testing and Gas Characterization of MEMS Devices using Mass Spectrometry.
Conference
·
Mon Feb 28 23:00:00 EST 2005
·
OSTI ID:947766
Characterizing PDMS degradation films produced on metal surfaces.
Conference
·
Wed Apr 01 00:00:00 EDT 2020
·
OSTI ID:1775056
Hermeticity Testing and Gas Characterization of MEMS Devices using Mass Spectrometry.
Conference
·
Sun Jun 01 00:00:00 EDT 2008
·
OSTI ID:1707798