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A comparison of thermomechanical and stress wave induced laser repair techniques for stiction-failed microcantilevers.

Conference ·
OSTI ID:947773
 [1];  [1];
  1. University of Illinois, Urbana, IL.
+ Show Author Affiliations
No abstract prepared.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
947773
Report Number(s):
SAND2004-4340C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
COMPARATIVE EVALUATIONS
LASER BEAM MACHINING
MECHANICAL STRUCTURES
MINIATURIZATION
REPAIR
THERMOMECHANICAL TREATMENTS