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Multiscale roughness and modeling of MEMS surfaces.

Journal Article · Tue Mar 01 04:00:00 EST 2005 · Proposed for publication in Tribology Letters.

OSTI ID:947272

Carpick, Robert W ^[1]; Redmond, James Michael; Bora, Can K; Street, Mark D ^[1]; Plesha, Michael E ^[1]; Starr, Michael James; Flater, Erin E ^[1]

University of WisconsinMadison, Madison, WI

No abstract prepared.

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Research Organization:: Sandia National Laboratories

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 947272

Report Number(s):: SAND2005-1387J

Journal Information:: Proposed for publication in Tribology Letters., Journal Name: Proposed for publication in Tribology Letters.

Country of Publication:: United States

Language:: English

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Related Subjects

42 ENGINEERING
MATHEMATICAL MODELS
MICROELECTRONICS
ROUGHNESS
SURFACES