Development of a testing facility for experimental investigation of MEMS dynamics.

Conference · Sun Aug 01 00:00:00 EDT 2004

OSTI ID:945187

Sumali, Hartono; Reu, Phillip L; Epp, David S; Ozdoganlar, O Burak ^[1]

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1. Carnegie Mellon University, Pittsburgh, PA

No abstract prepared.

• Research Organization: Sandia National Laboratories
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 945187
• Report Number(s): SAND2004-4515C
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
DESIGN
MICROELECTRONIC CIRCUITS
MINIATURIZATION
TEST FACILITIES
TESTING