Micromachined atomic force microscopy sensor with intergratedpiezoresistive sensor and thermal bimorph actuator for high-speedtapping-mode atomic force microscopy phase-imaging in highereigenmodes
Journal Article
·
· Journal of Vacuum Science Thechnology B
OSTI ID:928700
No abstract prepared.
- Research Organization:
- COLLABORATION - U.Kassel
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 928700
- Report Number(s):
- LBNL--54818; BnR: AT5015031
- Journal Information:
- Journal of Vacuum Science Thechnology B, Journal Name: Journal of Vacuum Science Thechnology B Journal Issue: 6 Vol. 21
- Country of Publication:
- United States
- Language:
- English
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