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Inter-diffusion and amorphization during ion-irradiation in Mo/Si nano-multi-layer materials.

Conference ·
OSTI ID:926133
; ; ; ; ;

No abstract prepared.

Research Organization:
Argonne National Laboratory (ANL)
Sponsoring Organization:
SC
DOE Contract Number:
AC02-06CH11357
OSTI ID:
926133
Report Number(s):
ANL/MSD/CP-107544
Country of Publication:
United States
Language:
ENGLISH

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Related Subjects

36 MATERIALS SCIENCE
AMORPHOUS STATE
COMPOSITE MATERIALS
DIFFUSION
ION IMPLANTATION
MOLYBDENUM
SILICON