Comparison of SCEM and STEM-HAADF imaging in thick specimens.

Journal Article · Mon Aug 01 00:00:00 EDT 2005 · Microscopy and Microanalysis

DOI:https://doi.org/10.1017/S1431927605502745· OSTI ID:925228

Zaluzec, N J; Hiller, J

The Scanning Confocal Electron Microscope has been shown to have significant advantages during imaging of thick specimens in both Materials and Biological applications. Since the electron optical configuration of STEM is a subset of the more general SCEM configuration, it is of interest to compare the performance of these two imaging modes. In the limit of infinitely thin specimens SCEM and STEM performance should be essentially be identical, this is born out by the '3D STEM' imaging of the ORNL group. In this work we compare imaging at the other extreme.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 925228
• Report Number(s): ANL/MSD/JA-52898
• Journal Information: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: Suppl. 1 ; Aug. 2005 Vol. 11; ISSN MIMIF7; ISSN 1431-9276
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

47 OTHER INSTRUMENTATION
COMPARATIVE EVALUATIONS
ELECTRON MICROSCOPES
MATERIALS
PERFORMANCE
THICKNESS