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Simulation of moving microbeams with the direct simulation Monte Carlo method.

Conference ·
OSTI ID:924226
;

Abstract Not Provided

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
924226
Report Number(s):
SAND2003-1905C
Country of Publication:
United States
Language:
English

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