Fabrication of Pillar-Structured Thermal Neutron Detectors
Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, ({sup 10}B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 {micro}m diameter silicon pillars with a 4 {micro}m pitch and pillar heights of 6 and 12 {micro}m. The pillar detector with a 12 {micro}m height achieved a thermal neutron detection efficiency of 7.3% at 2V.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 924015
- Report Number(s):
- UCRL-PROC-236680; TRN: US0802002
- Resource Relation:
- Conference: Presented at: IEEE Nuclear Science Symposium, Honolulu, HI, United States, Oct 27 - Nov 03, 2007
- Country of Publication:
- United States
- Language:
- English
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