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Title: Microscale rarefied gas dynamics and surface interactions for EUVL and MEMS applications.

Abstract

A combined experimental/modeling study was conducted to better understand the critical role of gas-surface interactions in rarefied gas flows. An experimental chamber and supporting diagnostics were designed and assembled to allow simultaneous measurements of gas heat flux and inter-plate gas density profiles in an axisymmetric, parallel-plate geometry. Measurements of gas density profiles and heat flux are made under identical conditions, eliminating an important limitation of earlier studies. The use of in situ, electron-beam fluorescence is demonstrated as a means to measure gas density profiles although additional work is required to improve the accuracy of this technique. Heat flux is inferred from temperature-drop measurements using precision thermistors. The system can be operated with a variety of gases (monatomic, diatomic, polyatomic, mixtures) and carefully controlled, well-characterized surfaces of different types (metals, ceramics) and conditions (smooth, rough). The measurements reported here are for 304 stainless steel plates with a standard machined surface coupled with argon, helium, and nitrogen. The resulting heat-flux and gas-density-profile data are analyzed using analytic and computational models to show that a simple Maxwell gas-surface interaction model is adequate to represent all of the observations. Based on this analysis, thermal accommodation coefficients for 304 stainless steel coupled with argon, nitrogen,more » and helium are determined to be 0.88, 0.80, and 0.38, respectively, with an estimated uncertainty of {+-}0.02.« less

Authors:
; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
919200
Report Number(s):
SAND2004-5329
TRN: US200825%%216
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ACCURACY; ARGON; CERAMICS; FLUORESCENCE; GAS FLOW; GASES; GEOMETRY; HEAT FLUX; HELIUM; MIXTURES; NITROGEN; PLATES; STAINLESS STEELS; THERMISTORS; Heat flux.; Gas dynamics.; Gas flow-Research.

Citation Formats

Gallis, Michail A, Rader, Daniel John, Castaneda, Jaime N, Torczynski, John Robert, Grasser, Thomas W, and Trott, Wayne Merle. Microscale rarefied gas dynamics and surface interactions for EUVL and MEMS applications.. United States: N. p., 2004. Web. doi:10.2172/919200.
Gallis, Michail A, Rader, Daniel John, Castaneda, Jaime N, Torczynski, John Robert, Grasser, Thomas W, & Trott, Wayne Merle. Microscale rarefied gas dynamics and surface interactions for EUVL and MEMS applications.. United States. doi:10.2172/919200.
Gallis, Michail A, Rader, Daniel John, Castaneda, Jaime N, Torczynski, John Robert, Grasser, Thomas W, and Trott, Wayne Merle. Mon . "Microscale rarefied gas dynamics and surface interactions for EUVL and MEMS applications.". United States. doi:10.2172/919200. https://www.osti.gov/servlets/purl/919200.
@article{osti_919200,
title = {Microscale rarefied gas dynamics and surface interactions for EUVL and MEMS applications.},
author = {Gallis, Michail A and Rader, Daniel John and Castaneda, Jaime N and Torczynski, John Robert and Grasser, Thomas W and Trott, Wayne Merle},
abstractNote = {A combined experimental/modeling study was conducted to better understand the critical role of gas-surface interactions in rarefied gas flows. An experimental chamber and supporting diagnostics were designed and assembled to allow simultaneous measurements of gas heat flux and inter-plate gas density profiles in an axisymmetric, parallel-plate geometry. Measurements of gas density profiles and heat flux are made under identical conditions, eliminating an important limitation of earlier studies. The use of in situ, electron-beam fluorescence is demonstrated as a means to measure gas density profiles although additional work is required to improve the accuracy of this technique. Heat flux is inferred from temperature-drop measurements using precision thermistors. The system can be operated with a variety of gases (monatomic, diatomic, polyatomic, mixtures) and carefully controlled, well-characterized surfaces of different types (metals, ceramics) and conditions (smooth, rough). The measurements reported here are for 304 stainless steel plates with a standard machined surface coupled with argon, helium, and nitrogen. The resulting heat-flux and gas-density-profile data are analyzed using analytic and computational models to show that a simple Maxwell gas-surface interaction model is adequate to represent all of the observations. Based on this analysis, thermal accommodation coefficients for 304 stainless steel coupled with argon, nitrogen, and helium are determined to be 0.88, 0.80, and 0.38, respectively, with an estimated uncertainty of {+-}0.02.},
doi = {10.2172/919200},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2004},
month = {11}
}

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