Development of highly integrated magetically and electrostatically actuated micropumps : LDRD 64709 final report.
- Pennsylvania State University, University Park, PA
- Florida State University, Tallahassee, FL
The pump and actuator systems designed and built in the SUMMiT{trademark} process, Sandia's surface micromachining polysilicon MEMS (Micro-Electro-Mechanical Systems) fabrication technology, on the previous campus executive program LDRD (SAND2002-0704P) with FSU/FAMU (Florida State University/Florida Agricultural and Mechanical University) were characterized in this LDRD. These results demonstrated that the device would pump liquid against the flow resistance of a microfabricated channel, but the devices were determined to be underpowered for reliable pumping. As a result a new set of SUMMiT{trademark} pumps with actuators that generate greater torque will be designed and submitted for fabrication. In this document we will report details of dry actuator/pump assembly testing, wet actuator/pump testing, channel resistance characterization, and new pump/actuator design recommendations.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 918219
- Report Number(s):
- SAND2003-4674
- Country of Publication:
- United States
- Language:
- English
Similar Records
Microdiagnostic Lab on a Chip - LDRD Final Report
Fabricating micro-instruments in surface-micromachined polycrystalline silicon