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The origins of growth stresses in amorphous semiconductor thin films.

Journal Article · Fri Feb 28 23:00:00 EST 2003 · Proposed for publication in Physical Review Letters.

OSTI ID:917484

Kotula, Paul Gabriel; Srolovitz, David J ^[1]; Floro, Jerrold Anthony; Seel, Steven Craig

Princeton University, Princeton, NJ

No abstract prepared.

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Research Organization:: Sandia National Laboratories

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 917484

Report Number(s):: SAND2003-0975J

Journal Information:: Proposed for publication in Physical Review Letters., Journal Name: Proposed for publication in Physical Review Letters.

Country of Publication:: United States

Language:: English

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Related Subjects

36 MATERIALS SCIENCE
SEMICONDUCTOR MATERIALS
STRESSES
THIN FILMS