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Office of Scientific and Technical Information
 

Shaped comb fingers for tailored electro-mechanical restoring force.

Journal Article · · Proposed for publication in Journal of Micro-Electro-Mechanical Systems.
OSTI ID:917458
 [1];  [2];  [3];  [2];
  1. University of Michigan, Ann Arbor, MI
  2. University of Michigan, Ann Arbor, MI
  3. MEMX, Inc., Albuquerque, NM
+ Show Author Affiliations

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
917458
Report Number(s):
SAND2003-0976J
Journal Information:
Proposed for publication in Journal of Micro-Electro-Mechanical Systems., Journal Name: Proposed for publication in Journal of Micro-Electro-Mechanical Systems.
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
DESIGN
ELECTROMECHANICS
MICROELECTRONIC CIRCUITS