Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Degradation of monolayer lubricants for MEMS.

Conference ·
OSTI ID:913514
; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
913514
Report Number(s):
SAND2003-0253C
Country of Publication:
United States
Language:
English

Similar Records

Monolayer Degradation and Vapor Deposited Bound + Mobile Lubrication In MEMS.
Conference · Wed Feb 28 23:00:00 EST 2007 · OSTI ID:1267242
Polymer based delivery of vapor phase lubrication for MEMS devices.
Conference · Fri Oct 01 00:00:00 EDT 2010 · OSTI ID:1026981
MEMS Lubrication by Tribochemical Reaction.
Conference · Mon Oct 01 00:00:00 EDT 2007 · OSTI ID:1146582

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
LUBRICANTS
MICROELECTRONIC CIRCUITS
PERFORMANCE