Subsurface Damage and Microstructure Development in Precision Microground Hard Ceramics Using Magnetorheological Finishing Spots

Journal Article · Wed Aug 01 04:00:00 EDT 2007 · Applied Optics

DOI:https://doi.org/10.1364/AO.46.005500· OSTI ID:910456

Shafrir, S N ^[1]; Lambropoulos, J C; Jacobs, S D

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1. Laboratory for Laser Energetics, University of Rochester, Rochester, NY

We demonstrate the use of spots taken with magnetorheological finishing (MRF) for estimating subsurface damage (SSD) depth from deterministic microgrinding for three hard ceramics: aluminum oxynitride (Al23O27N5/ALON), polycrystalline alumina (AL2O3/PCA), and chemical vapor deposited (CVD) silicon carbide (Si4C/SiC). Using various microscopy techniques to characterize the surfaces, we find that the evolution of surface microroughness with the amount of material removed shows two stages. In the first, the damaged layer and SSD induced by microgrinding are removed, and the surface roughness reaches a low value. Peak-to-valley (p-v) surface microroughness induced from grinding gives a measure of the SSD depth in the first stage. With the removal of additional material, a second stage develops, wherein the interaction of MRF and the material's microstructure is revealed. We study the development of this texture for these har ceramics with the use of power spectral density to characterize surface features.

• Research Organization: Laboratory for Laser Energetics, University of Rochester
• Sponsoring Organization: USDOE
• DOE Contract Number: FC52-92SF19460
• OSTI ID: 910456
• Report Number(s): DOE/SF/19460-769; 2007-16; 1737
• Journal Information: Applied Optics, Journal Name: Applied Optics Journal Issue: 22 Vol. 46; ISSN 0003-6935; ISSN APOPAI
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CERAMICS
DAMAGE
GRINDING
MICROSTRUCTURE
NITRIDES
ROUGHNESS
SILICON CARBIDES
SPECTRAL DENSITY
TEXTURE