Micromachined piezoresistive proximal probe with integratedbimorph actuator for aligned single ion implantation
Conference
·
OSTI ID:909519
The authors report a microfabrication procedure ofself-actuated piezoresistive scanning probes (SAPSPs). They are designedfor a SAPSP instrument that is integrated with an ion beam for alignedsingle ion implantation in ultrahigh vacuum. The novelty of the design isan integrated hollow pyramid, instead of a previously mechanically handmounted pyramid [J. Vac. Sci. Technol. B 23, 2798 (2005)]. Thepyramidhas dual purpose. First it collimates the ion beam and suppressessecondary particles from the back side of the cantilever, so thatsecondary particles from the target material can be used for single iondetection. Second the pyramid also provides an atomic force microscopetip for the scanning probe. A crucial step in the fabrication is the backside opening via etching for the hollow pyramid. The fabricationprocedure will be discussed in detail.
- Research Organization:
- COLLABORATION - University ofKassel
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 909519
- Report Number(s):
- LBNL--62781
- Country of Publication:
- United States
- Language:
- English
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