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Small-Angle Neutron Scattering Studies of a-Si:H and a-Si:D

Conference ·
OSTI ID:909449
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The heterogeneity of hydrogen and deuterium on the nanometer scale has been probed by samll-angle neutron scattering (SANS) from a-Si:H and a-Si:D films. Films were depsoited by two techniques, plasma-enhanced chemical vapor deposition (PECVD) and hot-wire chemical vapor deposition (HWCVD) using conditions that yield high quality films and devices.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
OSTI ID:
909449
Country of Publication:
United States
Language:
English

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Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
AMORPHOUS SI
APPLICATIONS
Amorphous Silicon
CADMIUM TELLURIDE
CHEMICAL VAPOR DEPOSITION
COMPONENTS
CONCENTRATORS
COPPER INDIUM DISELENIDE
CRYSTALLINE SI
DEUTERIUM
HYDROGEN
MANUFACTURING
MARKETS
Material Properties: Structural
Vibrational
& Elastic
NCPV
NEUTRONS
PHOTOVOLTAICS
RESEARCH AND DEVELOPMENT
SCATTERING
SYSTEMS
SYSTEMS INTEGRATION
Si Based Materials (not devices): Hydrogenated Amorphous Si
Silicon Materials and Devices
Solar Energy - Photovoltaics
THIN-FILMS