High pressure capillary micro-fluidic valve device and a method of fabricating same
- Fremont, CA
- Berkely, CA
- Milbury, MA
A freeze-thaw valve and a method of micro-machining the freeze-thaw valve is provided and includes a valve housing, wherein the valve housing defines a housing cavity and includes a housing inlet, a housing vent, a capillary tubing inlet and a capillary tubing outlet. A valve body is provided, at least a portion of which is lithographically constructed, wherein the valve body includes a refrigerant inlet, a refrigerant outlet and an expansion chamber. The expansion chamber is disposed to communicate the refrigerant inlet with the refrigerant outlet and includes a restriction region having a flow restriction. Additionally, the valve body is disposed within the housing cavity to form an insulating channel between the valve housing and the valve body.
- Research Organization:
- Waters Investments Ltd. (New Castle, DE)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Waters Investments Ltd. (New Castle, DE)
- Patent Number(s):
- 7,204,264
- OSTI ID:
- 908976
- Country of Publication:
- United States
- Language:
- English
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