Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Science-based MEMS reliability methodology.

Conference ·
OSTI ID:908074
; ; ;

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
908074
Report Number(s):
SAND2007-2701C
Country of Publication:
United States
Language:
English

Similar Records

Science-Based MEMS Reliability Methodology.
Conference · Sun Jul 01 00:00:00 EDT 2007 · OSTI ID:1147269
Science-Based MEMS Reliability Methodology.
Conference · Mon Oct 01 00:00:00 EDT 2007 · OSTI ID:1716627
Investing reliability issues in RF MEMS.
Conference · Sat Dec 31 23:00:00 EST 2005 · OSTI ID:892066

Related Subjects

42 ENGINEERING
MEMBRANES
MINIATURIZATION
RELIABILITY