Microelectromechanical power generator and vibration sensor
Patent
·
OSTI ID:908039
- Tijeras, NM
- Albuquerque, NM
A microelectromechanical (MEM) apparatus is disclosed which can be used to generate electrical power in response to an external source of vibrations, or to sense the vibrations and generate an electrical output voltage in response thereto. The MEM apparatus utilizes a meandering electrical pickup located near a shuttle which holds a plurality of permanent magnets. Upon movement of the shuttle in response to vibrations coupled thereto, the permanent magnets move in a direction substantially parallel to the meandering electrical pickup, and this generates a voltage across the meandering electrical pickup. The MEM apparatus can be fabricated by LIGA or micromachining.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Alburquerque, NM)
- Patent Number(s):
- 7,142,075
- Application Number:
- AC04-94AL85000
- OSTI ID:
- 908039
- Country of Publication:
- United States
- Language:
- English
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