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Microelectromechanical power generator and vibration sensor

Patent ·
OSTI ID:908039

A microelectromechanical (MEM) apparatus is disclosed which can be used to generate electrical power in response to an external source of vibrations, or to sense the vibrations and generate an electrical output voltage in response thereto. The MEM apparatus utilizes a meandering electrical pickup located near a shuttle which holds a plurality of permanent magnets. Upon movement of the shuttle in response to vibrations coupled thereto, the permanent magnets move in a direction substantially parallel to the meandering electrical pickup, and this generates a voltage across the meandering electrical pickup. The MEM apparatus can be fabricated by LIGA or micromachining.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Alburquerque, NM)
Patent Number(s):
7,142,075
Application Number:
AC04-94AL85000
OSTI ID:
908039
Country of Publication:
United States
Language:
English

References (8)

Development of an electromagnetic micro-generator journal January 2001
Feasibility study of a vibration powered micro-electric generator conference January 1996
Permanent magnet films for applications in microelectromechanical systems journal February 2000
Design and fabrication of a new vibration-based electromechanical power generator journal August 2001
Towards a piezoelectric vibration-powered microgenerator journal January 2001
A proposal of electric power generating system for implanted medical devices journal January 1999
A laser-micromachined multi-modal resonating power transducer for wireless sensing systems journal April 2002
Self-powered signal processing using vibration-based power generation journal May 1998

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