Growth of metastable Ge{sub 1{minus}{ital x}}Sn{sub {ital x}}/Ge strained layer superlattices on Ge(001)2{times}1 by temperature-modulated molecular beam epitaxy
- Coordinated Science Laboratory, Materials Research Laboratory, and Materials Science Department, University of Illinois, 1101 West Springfield Avenue, Urbana, Illinois 61801 (United States)
- Department of Physics, Linkoeping University, 581 83 Linkoeping (Sweden)
Single-crystal metastable diamond-structure Ge{sub 1{minus}{ital x}}Sn{sub {ital x}}/Ge strained-layer superlattices (SLS) with {ital x} up to 0.24 (the equilibrium solid solubility of Sn in Ge is {lt}0.01) have been grown on Ge(001)2{times}1 substrates using temperature-modulated molecular-beam epitaxy with maximum growth temperatures {ital T}{sub {ital s}}{le}150 {degree}C. {ital In} {ital situ} reflection high energy electron diffraction combined with postdeposition high-resolution x-ray diffraction (HR-XRD) and cross-sectional transmission electron microscopy results show that the Ge{sub 1{minus}{ital x}}Sn{sub {ital x}}(001)2{times}1 alloy and Ge(001)2{times}1 spacer layers are commensurate. In fact, the alloy layers are essentially fully strained with an average in-plane lattice constant mismatch of (1{plus_minus}2){times}10{sup {minus}5} and an average tetragonal strain in the growth direction of (1.39{plus_minus}0.03){times}10{sup {minus}2} as determined from HR-XRD reciprocal-space lattice maps obtained using asymmetric (113) reflections. {omega} broadening of the zero-order SLS peak was only 30.1 arc sec FWHM, indicating that the degree of mosaicity in these structures is negligible. The intensities and positions of the satellite reflections and finite-thickness interference fringes in HR-XRD 004 rocking curve {omega}-2{theta} scans are in good agreement with simulated patterns obtained using a dynamical scattering model. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.
- OSTI ID:
- 90457
- Journal Information:
- Applied Physics Letters, Vol. 67, Issue 7; Other Information: PBD: 14 Aug 1995
- Country of Publication:
- United States
- Language:
- English
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