Testing EUV optics with EUV light: if you can measure it, you canmake it
Journal Article
·
· The International Society for Optical Engineering -Newsroom
No abstract prepared.
- Research Organization:
- Ernest Orlando Lawrence Berkeley NationalLaboratory, Berkeley, CA (US)
- Sponsoring Organization:
- USDOE Director. Office of Science. Office of AdvancedScientific Computing Research. Office of Basic EnergySciences
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 903501
- Report Number(s):
- LBNL--61002-JArt; BnR: KC0202030
- Journal Information:
- The International Society for Optical Engineering -Newsroom, Journal Name: The International Society for Optical Engineering -Newsroom Journal Issue: 10.1117/2.1200601.0032
- Country of Publication:
- United States
- Language:
- English
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