Investigating the impact of carbon contamination on RF MEMS reliability.

Conference · Sat Dec 31 23:00:00 EST 2005

OSTI ID:902576

Nordquist, Christopher Daniel; Christodoulou, Christos George ^[1]; Carton, Andrew James; Dyck, Christopher William

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1. University of New Mexico, Albuquerque, NM

No abstract prepared.

• Research Organization: Sandia National Laboratories
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 902576
• Report Number(s): SAND2006-0304C
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
CARBON
CONTAMINATION
MICROELECTRONICS
MINIATURIZATION
RELIABILITY