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Real Time Spectroscopic Ellipsometry Studies of the Growth of Amorphous and Epitaxial Silicon for Photovoltaic Applications

Journal Article · · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces, and Films
DOI:https://doi.org/10.1116/1.2167083· OSTI ID:897439
No abstract prepared.
Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
OSTI ID:
897439
Journal Information:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces, and Films Journal Issue: 4, July/August 2006 Vol. 24
Country of Publication:
United States
Language:
English